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0.1 nm resolution nanopositioner P-620.1/629.1

Type with a stroke of 50 to 1800 µm, high-resolution operation with capacitive sensors.

The PIHera P-620.1/629.1 series is a one-axis nanopositioner that combines a flexure guide with PICMA® piezo technology. It has a stroke range of 50 to 1800 µm, a minimum resolution of 0.1 nm, and achieves a linearity error of 0.02% by measuring the actual moving parts with an integrated capacitive sensor. The flexure guide has no wear parts, offers high rigidity, excellent straightness, and outstanding long-term stability. It can also be expanded to X, XY, Z, and XYZ configurations, making it ideal for applications such as microscope sample scanning, optical alignment, and interferometric measurements. *For more details, please download the PDF or contact us.*

  • Actuator
  • Piezoelectric Devices
  • encoder
  • Axis of maintenance

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